A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave

DIngkang Wang; Conor Watkins; Sanjeev Koppal; Mengyuan Li; Yingtao DIng; Huikai Xie

doi:10.1109/TRANSDUCERS.2019.8808659

A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave

DIngkang Wang, Conor Watkins, Sanjeev Koppal, Mengyuan Li, Yingtao DIng, Huikai Xie

集成电路与电子学院

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

18 引用（Scopus）

摘要

Low-cost LiDAR with compact omnidirectional 360° scanners are needed for automobiles and robotics. This paper reports a compact omnidirectional scanner based on an electrothermal MEMS mirror, in which a circular pattern is generated by a two-axis tripod electrothermal MEMS mirror at non-resonant mode combined with a cone mirror. Meanwhile the vertical scanning field of view (FoV) up to 8° is also achieved. Compared to other omnidirectional scanners based on motorized optomechanics, this MEMS-based omnidirectional scanner has the potential to greatly decrease the size, cost and power consumption for LiDAR.

源语言	英语
主期刊名	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
出版商	Institute of Electrical and Electronics Engineers Inc.
页	1526-1529
页数	4
ISBN（电子版）	9781728120072
DOI	https://doi.org/10.1109/TRANSDUCERS.2019.8808659
出版状态	已出版 - 6月 2019
活动	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, 德国期限: 23 6月 2019 → 27 6月 2019

出版系列

姓名	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

会议

会议	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
国家/地区	德国
市	Berlin
时期	23/06/19 → 27/06/19

访问文件

10.1109/TRANSDUCERS.2019.8808659

其它文件与链接

链接到 Scopus 的出版物

引用此

Wang, DI., Watkins, C., Koppal, S., Li, M., DIng, Y., & Xie, H. (2019). A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave. 在 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (页码 1526-1529). 文章 8808659 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808659

Wang, DIngkang ; Watkins, Conor ; Koppal, Sanjeev 等. / A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. 页码 1526-1529 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

@inproceedings{7c1434f90cfb49b98818a24ede87ce8a,

title = "A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave",

abstract = "Low-cost LiDAR with compact omnidirectional 360° scanners are needed for automobiles and robotics. This paper reports a compact omnidirectional scanner based on an electrothermal MEMS mirror, in which a circular pattern is generated by a two-axis tripod electrothermal MEMS mirror at non-resonant mode combined with a cone mirror. Meanwhile the vertical scanning field of view (FoV) up to 8° is also achieved. Compared to other omnidirectional scanners based on motorized optomechanics, this MEMS-based omnidirectional scanner has the potential to greatly decrease the size, cost and power consumption for LiDAR.",

keywords = "Electrothermal acutator, Laser Scanner, LiDAR, Micromirror, Non-resonant scanning, Omnidirectional",

author = "DIngkang Wang and Conor Watkins and Sanjeev Koppal and Mengyuan Li and Yingtao DIng and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808659",

language = "English",

series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

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Wang, DI, Watkins, C, Koppal, S, Li, M, DIng, Y & Xie, H 2019, A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave. 在 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808659, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., 页码 1526-1529, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, 德国, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808659

A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave. / Wang, DIngkang; Watkins, Conor; Koppal, Sanjeev 等.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. 页码 1526-1529 8808659 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave

AU - Wang, DIngkang

AU - Watkins, Conor

AU - Koppal, Sanjeev

AU - Li, Mengyuan

AU - DIng, Yingtao

AU - Xie, Huikai

PY - 2019/6

Y1 - 2019/6

N2 - Low-cost LiDAR with compact omnidirectional 360° scanners are needed for automobiles and robotics. This paper reports a compact omnidirectional scanner based on an electrothermal MEMS mirror, in which a circular pattern is generated by a two-axis tripod electrothermal MEMS mirror at non-resonant mode combined with a cone mirror. Meanwhile the vertical scanning field of view (FoV) up to 8° is also achieved. Compared to other omnidirectional scanners based on motorized optomechanics, this MEMS-based omnidirectional scanner has the potential to greatly decrease the size, cost and power consumption for LiDAR.

AB - Low-cost LiDAR with compact omnidirectional 360° scanners are needed for automobiles and robotics. This paper reports a compact omnidirectional scanner based on an electrothermal MEMS mirror, in which a circular pattern is generated by a two-axis tripod electrothermal MEMS mirror at non-resonant mode combined with a cone mirror. Meanwhile the vertical scanning field of view (FoV) up to 8° is also achieved. Compared to other omnidirectional scanners based on motorized optomechanics, this MEMS-based omnidirectional scanner has the potential to greatly decrease the size, cost and power consumption for LiDAR.

KW - Electrothermal acutator

KW - Laser Scanner

KW - LiDAR

KW - Micromirror

KW - Non-resonant scanning

KW - Omnidirectional

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U2 - 10.1109/TRANSDUCERS.2019.8808659

DO - 10.1109/TRANSDUCERS.2019.8808659

M3 - Conference contribution

AN - SCOPUS:85071908569

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

SP - 1526

EP - 1529

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -

Wang DI, Watkins C, Koppal S, Li M, DIng Y, Xie H. A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave. 在 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. 页码 1526-1529. 8808659. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808659

A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave

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