A 2-AXIS SI/AL Bimorph-Based Electrothermal Micromirror Integrated with Piezoresistors for High Resolution Position Sensing

Yue Tang, Xiaoyi Wang, Lixin Xu, Huikai Xie^*

^*此作品的通讯作者

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

Engineering