@inproceedings{b68404ea5f9a4f0a867753b4df092924,
title = "Wavefront aberrations control for complex optical systems by compensation-surface",
abstract = "Figure-errors as an optical manufacture error would degrade the performance of optical system. Optical componentsclocking around optical axis is a classical method of figure-errors compensation. However, the compensation ability of optical-component clocking is limited by the distribution of actual figure-error. This paper proposes a compensationsurface method, which is a simple and effective method for figure-error compensation. Based on the predicted wavefront error with actual figure error, an analytical computational method of figure function of the compensation-surface is built. The figure of compensation-surface is a deterministic polished surface. Finally the other figure errors can be largely compensated by the compensation-surface. The method is implemented on a manufactured optical system, a 193nm small-field projection lens. Simulation experiment proves our method can greatly reduce the aberration caused by figure errors. The WFE can be reduced to 0.04λ (λ=193.29nm) from 0.265λ and reduced by 84%. The compensation effect is more remarkable, and nearly 2.7 times the compensation effect of optical-component clocking method.",
keywords = "Aberration compensation, Figure error, Lithography, Surface irregularity",
author = "Xiaolin Liu and Yanqiu Li and Ke Liu",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; International Conference on Frontiers in International Conference on Frontiers in Terahertz Technology and Applications, and the International Symposium on Surface Topography and Optical Microscopy ; Conference date: 23-07-2015 Through 25-07-2015",
year = "2015",
doi = "10.1117/12.2218151",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Daren Lv and Lijun Wang and Libin Xiang and Petelin, {Michael I.} and Guangjin Zhang and Songlin Zhuang and Shenggang Liu",
booktitle = "Selected Papers of the Photoelectronic Technology Committee Conferences held June-July 2015",
address = "United States",
}