Transient thermal and structural deformation and its impact on optical performance of projection optics for extreme ultraviolet lithography

Ke Liu*, Yanqiu Li, Fuchang Zhang, Mingzhe Fan

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Transient thermal and structural deformation and its impact on optical performance of projection optics for extreme ultraviolet lithography'. Together they form a unique fingerprint.

Engineering

Material Science