Thin Film PZT Multimode Resonant MEMS Temperature Sensor

Wen Sui^*, Tahmid Kaisar^*, Haoran Wang, Yihao Wu, Jaesung Lee, Huikai Xie, Philip X.L. Feng^*

^*Corresponding author for this work

School of Integrated Circuits and Electronics

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Engineering

Material Science

Chemical Engineering