Thermal and structural deformation and its impact on optical performance of projection optics for extreme ultraviolet lithography

Yanqiu Li; Kazuya Ota; Katsuhiko Murakami

doi:10.1116/1.1534573

Thermal and structural deformation and its impact on optical performance of projection optics for extreme ultraviolet lithography

Yanqiu Li, Kazuya Ota, Katsuhiko Murakami

Nikon Corporation

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

Detailed simulation of thermal and structural deformation and its impact on the optical performance of Nikon's 6-mirror projection optics was performed. The simulation employed the commercial software I-DEAS and CODE V, as well as in-house software. The results show that (a) the maximum temperature increase is 4.09°C in the smallest mirror, (b) the maximum thermal deformation at clear aperture is about 0.251 nm rms, and (c) the maximum nonspherical deformation at clear aperture is about 0.035 nm rms.

Original language	English
Pages (from-to)	127-129
Number of pages	3
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
DOIs	https://doi.org/10.1116/1.1534573
Publication status	Published - 2003
Externally published	Yes

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abstract = "Detailed simulation of thermal and structural deformation and its impact on the optical performance of Nikon's 6-mirror projection optics was performed. The simulation employed the commercial software I-DEAS and CODE V, as well as in-house software. The results show that (a) the maximum temperature increase is 4.09°C in the smallest mirror, (b) the maximum thermal deformation at clear aperture is about 0.251 nm rms, and (c) the maximum nonspherical deformation at clear aperture is about 0.035 nm rms.",

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AU - Li, Yanqiu

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AU - Murakami, Katsuhiko

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AB - Detailed simulation of thermal and structural deformation and its impact on the optical performance of Nikon's 6-mirror projection optics was performed. The simulation employed the commercial software I-DEAS and CODE V, as well as in-house software. The results show that (a) the maximum temperature increase is 4.09°C in the smallest mirror, (b) the maximum thermal deformation at clear aperture is about 0.251 nm rms, and (c) the maximum nonspherical deformation at clear aperture is about 0.035 nm rms.

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JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ER -

Thermal and structural deformation and its impact on optical performance of projection optics for extreme ultraviolet lithography

Abstract

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