Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review

Shanshan Chen, Yongyue Zhang, Xiaorong Hong, Jiafang Li*

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

15 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review'. Together they form a unique fingerprint.

Material Science

Engineering