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Study on stiffness characterization of planar W-form micro-springs based on MEMS technology
Guang He
*
, Geng Chen Shi
*
Corresponding author for this work
School of Mechatronical Engineering
Beijing Institute of Technology
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Article
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peer-review
7
Citations (Scopus)
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Engineering
Microelectromechanical System
100%
Structural Parameter
66%
Simulation Result
33%
Finite Element Method
33%
Design Optimization
33%
Energy Method
33%
Material Constant
33%
Tensile Test
33%