Study of Vacuum-Assisted Spin Coating of Polymer Liner for High-Aspect-Ratio Through-Silicon-Via Applications

Yangyang Yan, Yingtao Ding*, Takafumi Fukushima, Kang Wook Lee, Mitsumasa Koyanagi

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

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