Status analysis on sputtering and erosion evaluation methods of ion optic systems

Long MIAO*, Tongxun YANG, Zhengxi ZHU, Chang LU, Zhiwen WU, Ningfei WANG

*Corresponding author for this work

Research output: Contribution to journal › Review article › peer-review

Fingerprint

Dive into the research topics of 'Status analysis on sputtering and erosion evaluation methods of ion optic systems'. Together they form a unique fingerprint.

Engineering