Fingerprint
Dive into the research topics of 'Room-temperature plasma doping without bias power for introduction of Fe, Au, Al, Ga, Sn and In into Si'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Room-temperature plasma doping without bias power for introduction of Fe, Au, Al, Ga, Sn and In into Si
Ruixiang Hou, Ziang Xie, Lei Li, Xixi Xie, Xiaolong Xu, Xin Fang, Li Tao, Wanjing Xu, Nongnong Ma, Youqin He, Xiao Chen, Shixiang Peng, Engang Fu, Zhigang Yuan, Guogang Qin*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
7
Citations
(Scopus)