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Reduction of capacitive coupling in inductively coupled plasmas by solenoid coils on dielectric window
Bocong Zheng, Maheshwar Shrestha, Keliang Wang, Thomas Schuelke, Evgeny Shun'ko, Veniamin Belkin, Qi Hua Fan*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
8
Citations
(Scopus)