Recent research progresses of micro-MEMS cryogenic refrigeratory

Shao Bo Liu; Yan Qiu Li; Mei Dong Liu; Yi Ke Zeng

Recent research progresses of micro-MEMS cryogenic refrigeratory

Shao Bo Liu, Yan Qiu Li, Mei Dong Liu, Yi Ke Zeng

Research output: Contribution to journal › Article › peer-review

Abstract

Due to the farther micromation and integration of MEMS and ULIC, a micro-cryogenic system is in urgent need for the cryogenic refrigeration of their microchips. Thus the micro-cryogenic refrigeratory without compressor and mechanical parts is put forward to study, which is based on the MEMS fabrication technique. The fundamentals, feasibility, prospect of this research field are briefly introduced in this paper.

Original language	English
Pages (from-to)	30-33
Number of pages	4
Journal	Yadian Yu Shengguang/Piezoelectrics and Acoustooptics
Volume	27
Issue number	1
Publication status	Published - Feb 2005
Externally published	Yes

Keywords

Electrocaloric effect
Ferroelectric thick film
Micro-MEMS cryogenic refrigeratory
Seeback effect
Thermoelectric thin film

Cite this

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title = "Recent research progresses of micro-MEMS cryogenic refrigeratory",

abstract = "Due to the farther micromation and integration of MEMS and ULIC, a micro-cryogenic system is in urgent need for the cryogenic refrigeration of their microchips. Thus the micro-cryogenic refrigeratory without compressor and mechanical parts is put forward to study, which is based on the MEMS fabrication technique. The fundamentals, feasibility, prospect of this research field are briefly introduced in this paper.",

keywords = "Electrocaloric effect, Ferroelectric thick film, Micro-MEMS cryogenic refrigeratory, Seeback effect, Thermoelectric thin film",

author = "Liu, {Shao Bo} and Li, {Yan Qiu} and Liu, {Mei Dong} and Zeng, {Yi Ke}",

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AU - Zeng, Yi Ke

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N2 - Due to the farther micromation and integration of MEMS and ULIC, a micro-cryogenic system is in urgent need for the cryogenic refrigeration of their microchips. Thus the micro-cryogenic refrigeratory without compressor and mechanical parts is put forward to study, which is based on the MEMS fabrication technique. The fundamentals, feasibility, prospect of this research field are briefly introduced in this paper.

AB - Due to the farther micromation and integration of MEMS and ULIC, a micro-cryogenic system is in urgent need for the cryogenic refrigeration of their microchips. Thus the micro-cryogenic refrigeratory without compressor and mechanical parts is put forward to study, which is based on the MEMS fabrication technique. The fundamentals, feasibility, prospect of this research field are briefly introduced in this paper.

KW - Electrocaloric effect

KW - Ferroelectric thick film

KW - Micro-MEMS cryogenic refrigeratory

KW - Seeback effect

KW - Thermoelectric thin film

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ER -

Recent research progresses of micro-MEMS cryogenic refrigeratory

Abstract

Keywords

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