Plasma low-pressure nonsteady diffusion fluid model for pulsed plasma recovery

Yi Li, Bocong Zheng*, M. K. Lei

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

In order to describe the diffusion behavior of low-pressure plasma, the low-pressure nonsteady diffusion fluid model is built using the equations of ion continuity and ion motion, Boltzmann's relationship of the electron, and variable mobility of the ion. The plasma recovery process in pulsed plasma is described by this model from the viewpoint of diffusion, which is the basic physical mechanism causing recovery. The fluid model is verified to be accurate compared with the particle-in-cell method. The characteristics of multipulse sheath dynamics are studied using this model for inner surface modification of a tube by the plasma-based ion implantation (PBII). Compared with the no-diffusion case, the sheath expansion during pulse-on time is accelerated, and the sheath is thicker when considering the plasma diffusion. During pulse-off time, the plasma recovery behavior of the ion-depleted region is obtained. For a shorter pulse-off time, the plasma cannot recover to its initial state. The maximum of the ion-implantation current can be strongly decreased due to the incomplete plasma recovery, but the average ion-implantation current is improved and achieves its maximum when the duty cycle is 0.8. All these results can provide beneficial theoretical guidance for the parameter optimization in the PBII.

Original languageEnglish
Article number6387316
Pages (from-to)43-48
Number of pages6
JournalIEEE Transactions on Plasma Science
Volume41
Issue number1
DOIs
Publication statusPublished - 2013
Externally publishedYes

Keywords

  • Fluid model
  • plasma diffusion
  • plasma recovery
  • plasma-based ion implantation (PBII)

Fingerprint

Dive into the research topics of 'Plasma low-pressure nonsteady diffusion fluid model for pulsed plasma recovery'. Together they form a unique fingerprint.

Cite this