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Performance Enhanced Thermal Flow Sensor with Novel Dual-Heater Structure Using CMOS Compatible Fabrication Process
Zhongyi Liu, Ruoqin Wang, Gai Yang, Xinyuan Zhang, Rui Jiao, Xuejiao Li, Jiali Qi, Hongyu Yu, Huikai Xie*, Xiaoyi Wang*
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
1
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(Scopus)