Microscopic 3D structural inversion technique for multilevel periodic structures with SEM moiré method

Chuanwei Li*, Huimin Xie, Zhanwei Liu, Shuli Liu

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Microscopic 3D structural inversion technique for multilevel periodic structures with SEM moiré method'. Together they form a unique fingerprint.

Engineering