High-throughput microchannel fabrication in fused silica by temporally shaped femtosecond laser Bessel-beam-assisted chemical etching

Zhi Wang, Lan Jiang, Xiaowei Li*, Andong Wang, Zhulin Yao, Kaihu Zhang, Yongfeng Lu

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

87 Citations (Scopus)

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