High-precision and high-speed surface topography measurement method of microstructures based on laser scanning transverse differential confocal

Sen Yu, Zhenru Wang, Lirong Qiu, Qidai Chen, Weiqian Zhao*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'High-precision and high-speed surface topography measurement method of microstructures based on laser scanning transverse differential confocal'. Together they form a unique fingerprint.

Physics

Engineering