Finite element analysis of multi-layer MEMS ferroelectric microcoolers

Yonghong Shang*, Yanqiu Li, Qingtao Zhang, Shaobo Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

On the basis of experiments, the paper presented a mathematical model for using Finite Element method, as well as investigated the temperature field characteristics under diverse situations. The results indicate, the efficiency of temperature reduction is better when all ceramic slices are working in simultaneous mode vs. in alternative mode. Under simultaneous mode, to enhance the pressure among layers will reduce temperature fluctuation. This is important to further investigations on the mechanisms and operating modes of MEMS microcoolers.

Original languageEnglish
Pages (from-to)260-262
Number of pages3
JournalZhongguo Jixie Gongcheng/China Mechanical Engineering
Volume16
Issue numberSUPPL.
Publication statusPublished - Jul 2005
Externally publishedYes

Keywords

  • Ferroelectric refrigeration
  • Finite element method
  • MEMS
  • Microcooler
  • PMNT

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Shang, Y., Li, Y., Zhang, Q., & Liu, S. (2005). Finite element analysis of multi-layer MEMS ferroelectric microcoolers. Zhongguo Jixie Gongcheng/China Mechanical Engineering, 16(SUPPL.), 260-262.