Fast nonlinear compressive sensing lithographic source and mask optimization method using Newton-IHTs algorithm

Yiyu Sun, Naiyuan Sheng, Tie Li, Yanqiu Li*, Enze Li, Pengzhi Wei

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fast nonlinear compressive sensing lithographic source and mask optimization method using Newton-IHTs algorithm'. Together they form a unique fingerprint.

Material Science

Mathematics

Computer Science

Engineering