Abstract
In low-pressure capacitively coupled discharges, a heating mode transition from a pressure-heating dominated state to an Ohmic-heating dominated state is known by applying a small transverse magnetic field. Here we demonstrate via particle-in-cell simulations and a moment analysis of the Boltzmann equation that the enhancement of Ohmic heating is induced by the Hall current in the E × B direction. As the magnetic field increases, the Ohmic heating in the E × B direction dominates the total electron power absorption. The Ohmic heating induced by the Hall current can be well approximated from the Ohmic heating of unmagnetized capacitively coupled discharges.
Original language | English |
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Article number | 09LT03 |
Journal | Plasma Sources Science and Technology |
Volume | 28 |
Issue number | 9 |
DOIs | |
Publication status | Published - 24 Sept 2019 |
Externally published | Yes |
Keywords
- Ohmic heating
- capacitively coupled plasmas
- electron power absorption
- magnetic field
- moments of Boltzmann equation
- particle in cell simulations