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Effects of substrate bias and temperature on the structure and dielectric properties of TixZr1−xNy ternary nitride thin films
Yujing Ran, Huiping Lu, Shujun Zhao, Liuwei Jia, Yinglan Li, Zhaotan Jiang, Zhi Wang*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
12
Citations
(Scopus)