Effect of He content on microstructure, mechanical properties and He thermal desorption behavior of W film fabricated by RF magnetron sputtering

Engineering

• Bcc Structure 50%
• Columnar Structure 50%
• Gas Mixture 50%
• Hardness Value 50%
• Magnetron 100%
• Microstructure 100%
• Nanoindentation Test 50%
• Radio Frequency 100%
• Si Substrate 50%
• Strain 50%
• X-Ray Diffraction Analysis 50%

Material Science

• Density 33%
• Desorption 100%
• Film 100%
• Gas Mixture 33%
• Grain Size 66%
• Magnetron Sputtering 100%
• Nanoindentation 33%
• Scanning Electron Microscopy 33%
• X Ray Diffraction Analysis 33%