Fingerprint
Dive into the research topics of 'Discharge and Deposition Characteristics of High-Power Impulse Magnetron Sputtering Using Various Target Materials'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Discharge and Deposition Characteristics of High-Power Impulse Magnetron Sputtering Using Various Target Materials
Bocong Zheng, Zhongzhen Wu*, Suihan Cui, Shu Xiao, Liangliang Liu, Hai Lin, Ricky K.Y. Fu, Xiubo Tian, Feng Pan, Paul K. Chu
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
14
Citations
(Scopus)