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Design and fabrication of a high-density multilayer metal-insulator-metal capacitor based on selective etching
V. F.G. Tseng
*
,
H. Xie
*
Corresponding author for this work
University of Florida
Research output
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Contribution to journal
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Article
›
peer-review
5
Citations (Scopus)
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Material Science
Density
100%
Capacitor
100%
Dielectric Material
40%
Oxide Compound
20%
Finite Element Method
20%
Capacitance
20%
Optical Lithography
20%
Silicon Nitride
20%