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Cu-plated through-wafer vias for AlGaN/GaN high electron mobility transistors on Si
K. H. Chen*, F. Ren, A. Pais, Huikai Xie, B. P. Gila, S. J. Pearton, J. W. Johnson, P. Rajagopal, J. C. Roberts, E. L. Piner, K. J. Linthicum
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
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(Scopus)