@inproceedings{dfd676be34994fb2afab9a1e60a35c60,
title = "A method for compensating the polarization aberration of projection optics in immersion lithography",
abstract = "As the numerical aperture (NA) of 193nm immersion lithography projection optics (PO) increasing, polarization aberration (PA) leads to image quality degradation seriously. PA induced by large incident angle of light, film coatings and intrinsic birefringence of lens materials cannot be ignored. An effective method for PA compensation is to adjust lens position in PO. However, this method is complicated. Therefore, in this paper, an easy and feasible PA compensation method is proposed: for ArF lithographic PO with hyper NA (NA=1.2), which is designed by our laboratory, the PA-induced critical dimension error (CDE) can be effectively reduced by optimizing illumination source partial coherent factor σout. In addition, the basic idea of our method to suppress pattern placement error (PE) is to adopt anti-reflection (AR) multi-layers MgF2/LaF3/MgF2 and calcium fluoride CaF2 of [111] crystal axes. Our simulation results reveal that the proposed method can effectively and quantificationally compensate large PA in the optics. In particular, our method suppresses the dynamic range of CDE from -12.7nm ∼ +4.3nm to -1.1nm ∼ +1.2nm, while keeping PE at an acceptable level.",
keywords = "birefringence, immersion lithography, polarization aberration, projection optics",
author = "Yue Jia and Yanqiu Li and Lihui Liu and Chunying Han and Xiaolin Liu",
note = "Publisher Copyright: {\textcopyright} 2014 SPIE.; 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, AOMATT 2014 ; Conference date: 26-04-2014 Through 29-04-2014",
year = "2014",
doi = "10.1117/12.2069711",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "A.G. Poleshchuk and Tianchun Ye and Song Hu",
booktitle = "7th International Symposium on Advanced Optical Manufacturing and Testing Technologies",
address = "United States",
}