A hybrid method for lattice image reconstruction and deformation analysis

Hongye Zhang; Runlai Peng; Huihui Wen; Huimin Xie; Zhanwei Liu

doi:10.1088/1361-6528/ac780f

A hybrid method for lattice image reconstruction and deformation analysis

Hongye Zhang^*, Runlai Peng, Huihui Wen, Huimin Xie, Zhanwei Liu^*

^*Corresponding author for this work

School of Aerospace Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Geometric phase analysis (GPA) is a powerful tool to investigate the deformation in nanoscale measurement, especially in dealing with high-resolution transmission electron microscopy images. The traditional GPA method using the fast Fourier transform is built on the relationship between the displacement and the phase difference. In this paper, a nano-grid method based on real-space lattice image processing was firstly proposed to enable the measurement of nanoscale interface flatness, and the thickness of different components. Then, a hybrid method for lattice image reconstruction and deformation analysis was developed. The hybrid method enables simultaneous real-space and frequency-domain processing, thus, compensating for the shortcomings of the GPA method when measuring samples with large deformations or containing cracks while retaining its measurement accuracy.

Original language	English
Article number	385706
Journal	Nanotechnology
Volume	33
Issue number	38
DOIs	https://doi.org/10.1088/1361-6528/ac780f
Publication status	Published - 17 Sept 2022

Keywords

HRTEM
deformation measurement
geometric phase analysis
lattice image reconstruction

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10.1088/1361-6528/ac780f

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title = "A hybrid method for lattice image reconstruction and deformation analysis",

abstract = "Geometric phase analysis (GPA) is a powerful tool to investigate the deformation in nanoscale measurement, especially in dealing with high-resolution transmission electron microscopy images. The traditional GPA method using the fast Fourier transform is built on the relationship between the displacement and the phase difference. In this paper, a nano-grid method based on real-space lattice image processing was firstly proposed to enable the measurement of nanoscale interface flatness, and the thickness of different components. Then, a hybrid method for lattice image reconstruction and deformation analysis was developed. The hybrid method enables simultaneous real-space and frequency-domain processing, thus, compensating for the shortcomings of the GPA method when measuring samples with large deformations or containing cracks while retaining its measurement accuracy.",

keywords = "HRTEM, deformation measurement, geometric phase analysis, lattice image reconstruction",

author = "Hongye Zhang and Runlai Peng and Huihui Wen and Huimin Xie and Zhanwei Liu",

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T1 - A hybrid method for lattice image reconstruction and deformation analysis

AU - Zhang, Hongye

AU - Peng, Runlai

AU - Wen, Huihui

AU - Xie, Huimin

AU - Liu, Zhanwei

PY - 2022/9/17

Y1 - 2022/9/17

N2 - Geometric phase analysis (GPA) is a powerful tool to investigate the deformation in nanoscale measurement, especially in dealing with high-resolution transmission electron microscopy images. The traditional GPA method using the fast Fourier transform is built on the relationship between the displacement and the phase difference. In this paper, a nano-grid method based on real-space lattice image processing was firstly proposed to enable the measurement of nanoscale interface flatness, and the thickness of different components. Then, a hybrid method for lattice image reconstruction and deformation analysis was developed. The hybrid method enables simultaneous real-space and frequency-domain processing, thus, compensating for the shortcomings of the GPA method when measuring samples with large deformations or containing cracks while retaining its measurement accuracy.

AB - Geometric phase analysis (GPA) is a powerful tool to investigate the deformation in nanoscale measurement, especially in dealing with high-resolution transmission electron microscopy images. The traditional GPA method using the fast Fourier transform is built on the relationship between the displacement and the phase difference. In this paper, a nano-grid method based on real-space lattice image processing was firstly proposed to enable the measurement of nanoscale interface flatness, and the thickness of different components. Then, a hybrid method for lattice image reconstruction and deformation analysis was developed. The hybrid method enables simultaneous real-space and frequency-domain processing, thus, compensating for the shortcomings of the GPA method when measuring samples with large deformations or containing cracks while retaining its measurement accuracy.

KW - HRTEM

KW - deformation measurement

KW - geometric phase analysis

KW - lattice image reconstruction

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DO - 10.1088/1361-6528/ac780f

M3 - Article

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SN - 0957-4484

VL - 33

JO - Nanotechnology

JF - Nanotechnology

IS - 38

M1 - 385706

ER -

A hybrid method for lattice image reconstruction and deformation analysis

Abstract

Keywords

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