高数值孔径自由曲面极紫外光刻物镜光学设计

Translated title of the contribution: Optical design of high numerical aperture extreme ultraviolet lithography objective with freeform surfaces

Shanshan Mao, Yanqiu Li, Ke Liu, Lihui Liu, Meng Zheng, Xu Yan

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

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