面向宽谱段共焦测量的消像差准直会聚方法

To solve the problem of large dispersion and large aberration in the broadband focusing system, a new method of collimation and convergence for aberration-free confocal measurement is proposed. The method uses a total reflection configuration to suppress the dispersion effects caused by different wavelength focusing, and utilizes a paraboloid configuration and annular beam to suppress aberrations. In this way, the accurate collimation and convergence of beams in the visible to infrared range can be realized. The collimation convergence method can eliminate dispersion and significantly suppress aberrations. Theoretical analysis and preliminary experiments indicate that the focal points completely coincide when the different wavelength light sources pass the collimated convergence system constructed by using this proposed method. The sidelobes of the focusing curve is significantly suppressed. The focusing resolution reaches 72.4 μm@1 064 nm which is close to the limit of theoretical calculation in the case of annular beam focusing.