激光共焦干涉面形快速高精度自动测量

Translated title of the contribution: Laser confocal interference surface rapid and high-precision automatic measurement

Jiahao Zhao, Shuai Yang^*, Zheng Yang, Jian Cui, Lirong Qiu, Weiqian Zhao

^*Corresponding author for this work

School of Optics and Photonics

Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

Engineering

Physics

Chemical Engineering