梳齿结构与振动梁复合的硅微谐振器的非线性分析

Translated title of the contribution: Nonlinear Analysis of Silicon Microresonator with Vibrating Beam Integrated with Comb Fingers Structure

Chunyan Zhou, Bo Hu*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Nonlinear Analysis of Silicon Microresonator with Vibrating Beam Integrated with Comb Fingers Structure'. Together they form a unique fingerprint.

Material Science

Engineering