微纳光机械传感器研究进展

Translated title of the contribution: Research progresses of micro-/nano-opto-mechanical sensors

Hao Zhe Sun, Xiao Rong Hong, Chang Yin Ji, Jia Fang Li*

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

2 Citations (Scopus)

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Engineering

Material Science