Abstract
According to the actual data of the high resolution lens all optical element, the axial and rotational compensation method, in the process of simulation precision with adjustable, the optimal value of the objective axial compensator and the best rotation angle of each element are obtained. The simulation results show that in the confidence interval of 97.7%, the RMS value of each field of the objective mirror is reduced from 0.087λ(λ=632.8 nm)to 0.040λ. According to the simulation to obtain the parameters are used for alignment experiment of the objective. The experiment results show that the wavefront error RMS value of the full field of view of the system tested by ZYGO interferometer is between 0.050 and 0.082λ, which almost meet the requirements of the diffraction limit and verify the validity of the optimization methods.
| Translated title of the contribution | The application of image quality compensation methods in fine assembly of the high resolution lens |
|---|---|
| Original language | Chinese (Traditional) |
| Pages (from-to) | 117-122 |
| Number of pages | 6 |
| Journal | Guangxue Jishu/Optical Technique |
| Volume | 44 |
| Issue number | 1 |
| Publication status | Published - 1 Jan 2018 |
| Externally published | Yes |