TY - GEN
T1 - The adhesion failure analysis of the MEMS gyroscope with comb capacitor
AU - Liang, X. J.
AU - Gao, S. Q.
PY - 2009
Y1 - 2009
N2 - The MEMS gyroscope has wide application foreground, the reliability of MEMS gyroscope is a key problem for its commercial application. With the development of the MEMS gyroscope industrialization, the reliability is underway to meet the need of market. In this paper, the adhesion failure modes of MEMS gyroscope is presented. In addition, the adhesion failure analysis is illustrated. Finally, a lateral comb capacitor structure to improve the reliability of the MEMS gyroscope is presented, the reliability of the lateral comb capacitor is discussed. The lateral comb capacitor structure is valuable for the optimize design of the other types of gyroscopes.
AB - The MEMS gyroscope has wide application foreground, the reliability of MEMS gyroscope is a key problem for its commercial application. With the development of the MEMS gyroscope industrialization, the reliability is underway to meet the need of market. In this paper, the adhesion failure modes of MEMS gyroscope is presented. In addition, the adhesion failure analysis is illustrated. Finally, a lateral comb capacitor structure to improve the reliability of the MEMS gyroscope is presented, the reliability of the lateral comb capacitor is discussed. The lateral comb capacitor structure is valuable for the optimize design of the other types of gyroscopes.
KW - Adhesion failure
KW - Lateral comb capacitor
KW - MEMS gyroscope
KW - Reliability
UR - http://www.scopus.com/inward/record.url?scp=77955959338&partnerID=8YFLogxK
U2 - 10.1109/ICRMS.2009.5270042
DO - 10.1109/ICRMS.2009.5270042
M3 - Conference contribution
AN - SCOPUS:77955959338
SN - 9781424449057
T3 - Proceedings of 2009 8th International Conference on Reliability, Maintainability and Safety, ICRMS 2009
SP - 1234
EP - 1236
BT - Proceedings of 2009 8th International Conference on Reliability, Maintainability and Safety, ICRMS 2009
T2 - 2009 8th International Conference on Reliability, Maintainability and Safety, ICRMS 2009
Y2 - 20 July 2009 through 24 July 2009
ER -