The adhesion failure analysis of the MEMS gyroscope with comb capacitor

X. J. Liang, S. Q. Gao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Citations (Scopus)

Abstract

The MEMS gyroscope has wide application foreground, the reliability of MEMS gyroscope is a key problem for its commercial application. With the development of the MEMS gyroscope industrialization, the reliability is underway to meet the need of market. In this paper, the adhesion failure modes of MEMS gyroscope is presented. In addition, the adhesion failure analysis is illustrated. Finally, a lateral comb capacitor structure to improve the reliability of the MEMS gyroscope is presented, the reliability of the lateral comb capacitor is discussed. The lateral comb capacitor structure is valuable for the optimize design of the other types of gyroscopes.

Original languageEnglish
Title of host publicationProceedings of 2009 8th International Conference on Reliability, Maintainability and Safety, ICRMS 2009
Pages1234-1236
Number of pages3
DOIs
Publication statusPublished - 2009
Event2009 8th International Conference on Reliability, Maintainability and Safety, ICRMS 2009 - Chengdu, China
Duration: 20 Jul 200924 Jul 2009

Publication series

NameProceedings of 2009 8th International Conference on Reliability, Maintainability and Safety, ICRMS 2009

Conference

Conference2009 8th International Conference on Reliability, Maintainability and Safety, ICRMS 2009
Country/TerritoryChina
CityChengdu
Period20/07/0924/07/09

Keywords

  • Adhesion failure
  • Lateral comb capacitor
  • MEMS gyroscope
  • Reliability

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Liang, X. J., & Gao, S. Q. (2009). The adhesion failure analysis of the MEMS gyroscope with comb capacitor. In Proceedings of 2009 8th International Conference on Reliability, Maintainability and Safety, ICRMS 2009 (pp. 1234-1236). Article 5270042 (Proceedings of 2009 8th International Conference on Reliability, Maintainability and Safety, ICRMS 2009). https://doi.org/10.1109/ICRMS.2009.5270042