Study of MXene Ti3C2Tx quantum dot thin film on quartz bulk acoustic wave uncooled infrared sensors

Lihui Feng; Jiajun Luo; Xiaoxiao Ma; Jianmin Cui; Yu Chen; Jihua Lu; Linlin Zhang; Zhiqiang Pei

doi:10.1364/OE.468458

Study of MXene Ti3C2Tx quantum dot thin film on quartz bulk acoustic wave uncooled infrared sensors

Lihui Feng^*, Jiajun Luo, Xiaoxiao Ma, Jianmin Cui, Yu Chen, Jihua Lu, Linlin Zhang, Zhiqiang Pei

^*此作品的通讯作者

科研成果: 期刊稿件 › 文章 › 同行评审

3 引用（Scopus）

摘要

The infrared absorption efficiency is essential for an infrared sensor. We propose a quartz bulk acoustic wave (BAW) uncooled infrared sensor coated with MXene quantum dot film. The infrared detection is realized by measuring the resonant frequency of a Y-cut quartz BAW sensitive unit. An infrared sensor is fabricated by MEMS process, then the MXene quantum dot film is coated through the spin coating technology. The mechanism of infrared absorption enhancement is analyzed. Test results show that after coating the film, the responsivity (R) of the sensor increased by nearly 41% at a wavelength of 830nm, from 10.88MHz/W to 15.28 MHz/W. The quartz BAW infrared sensor combined with MXene quantum dots film has the potential of high-performance infrared detection.

源语言	英语
页（从-至）	34129-34139
页数	11
期刊	Optics Express
卷	30
期	19
DOI	https://doi.org/10.1364/OE.468458
出版状态	已出版 - 12 9月 2022

访问文件

10.1364/OE.468458

其它文件与链接

链接到 Scopus 的出版物

引用此

@article{c9e25fab48db4c5c8b0bea35daf3e406,

title = "Study of MXene Ti3C2Tx quantum dot thin film on quartz bulk acoustic wave uncooled infrared sensors",

abstract = "The infrared absorption efficiency is essential for an infrared sensor. We propose a quartz bulk acoustic wave (BAW) uncooled infrared sensor coated with MXene quantum dot film. The infrared detection is realized by measuring the resonant frequency of a Y-cut quartz BAW sensitive unit. An infrared sensor is fabricated by MEMS process, then the MXene quantum dot film is coated through the spin coating technology. The mechanism of infrared absorption enhancement is analyzed. Test results show that after coating the film, the responsivity (R) of the sensor increased by nearly 41% at a wavelength of 830nm, from 10.88MHz/W to 15.28 MHz/W. The quartz BAW infrared sensor combined with MXene quantum dots film has the potential of high-performance infrared detection.",

author = "Lihui Feng and Jiajun Luo and Xiaoxiao Ma and Jianmin Cui and Yu Chen and Jihua Lu and Linlin Zhang and Zhiqiang Pei",

note = "Publisher Copyright: {\textcopyright} 2022 Optica Publishing Group.",

year = "2022",

month = sep,

day = "12",

doi = "10.1364/OE.468458",

language = "English",

volume = "30",

pages = "34129--34139",

journal = "Optics Express",

issn = "1094-4087",

publisher = "Optica Publishing Group",

number = "19",

}

TY - JOUR

T1 - Study of MXene Ti3C2Tx quantum dot thin film on quartz bulk acoustic wave uncooled infrared sensors

AU - Feng, Lihui

AU - Luo, Jiajun

AU - Ma, Xiaoxiao

AU - Cui, Jianmin

AU - Chen, Yu

AU - Lu, Jihua

AU - Zhang, Linlin

AU - Pei, Zhiqiang

PY - 2022/9/12

Y1 - 2022/9/12

N2 - The infrared absorption efficiency is essential for an infrared sensor. We propose a quartz bulk acoustic wave (BAW) uncooled infrared sensor coated with MXene quantum dot film. The infrared detection is realized by measuring the resonant frequency of a Y-cut quartz BAW sensitive unit. An infrared sensor is fabricated by MEMS process, then the MXene quantum dot film is coated through the spin coating technology. The mechanism of infrared absorption enhancement is analyzed. Test results show that after coating the film, the responsivity (R) of the sensor increased by nearly 41% at a wavelength of 830nm, from 10.88MHz/W to 15.28 MHz/W. The quartz BAW infrared sensor combined with MXene quantum dots film has the potential of high-performance infrared detection.

AB - The infrared absorption efficiency is essential for an infrared sensor. We propose a quartz bulk acoustic wave (BAW) uncooled infrared sensor coated with MXene quantum dot film. The infrared detection is realized by measuring the resonant frequency of a Y-cut quartz BAW sensitive unit. An infrared sensor is fabricated by MEMS process, then the MXene quantum dot film is coated through the spin coating technology. The mechanism of infrared absorption enhancement is analyzed. Test results show that after coating the film, the responsivity (R) of the sensor increased by nearly 41% at a wavelength of 830nm, from 10.88MHz/W to 15.28 MHz/W. The quartz BAW infrared sensor combined with MXene quantum dots film has the potential of high-performance infrared detection.

UR - http://www.scopus.com/inward/record.url?scp=85137651985&partnerID=8YFLogxK

U2 - 10.1364/OE.468458

DO - 10.1364/OE.468458

M3 - Article

C2 - 36242433

AN - SCOPUS:85137651985

SN - 1094-4087

VL - 30

SP - 34129

EP - 34139

JO - Optics Express

JF - Optics Express

IS - 19

ER -

Study of MXene Ti3C2Tx quantum dot thin film on quartz bulk acoustic wave uncooled infrared sensors

摘要

访问文件

其它文件与链接

指纹

引用此