Study of MXene Ti3C2Tx quantum dot thin film on quartz bulk acoustic wave uncooled infrared sensors

Lihui Feng; Jiajun Luo; Xiaoxiao Ma; Jianmin Cui; Yu Chen; Jihua Lu; Linlin Zhang; Zhiqiang Pei

doi:10.1364/OE.468458

Study of MXene Ti3C2Tx quantum dot thin film on quartz bulk acoustic wave uncooled infrared sensors

Lihui Feng^*, Jiajun Luo, Xiaoxiao Ma, Jianmin Cui, Yu Chen, Jihua Lu, Linlin Zhang, Zhiqiang Pei

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The infrared absorption efficiency is essential for an infrared sensor. We propose a quartz bulk acoustic wave (BAW) uncooled infrared sensor coated with MXene quantum dot film. The infrared detection is realized by measuring the resonant frequency of a Y-cut quartz BAW sensitive unit. An infrared sensor is fabricated by MEMS process, then the MXene quantum dot film is coated through the spin coating technology. The mechanism of infrared absorption enhancement is analyzed. Test results show that after coating the film, the responsivity (R) of the sensor increased by nearly 41% at a wavelength of 830nm, from 10.88MHz/W to 15.28 MHz/W. The quartz BAW infrared sensor combined with MXene quantum dots film has the potential of high-performance infrared detection.

Original language	English
Pages (from-to)	34129-34139
Number of pages	11
Journal	Optics Express
Volume	30
Issue number	19
DOIs	https://doi.org/10.1364/OE.468458
Publication status	Published - 12 Sept 2022

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title = "Study of MXene Ti3C2Tx quantum dot thin film on quartz bulk acoustic wave uncooled infrared sensors",

abstract = "The infrared absorption efficiency is essential for an infrared sensor. We propose a quartz bulk acoustic wave (BAW) uncooled infrared sensor coated with MXene quantum dot film. The infrared detection is realized by measuring the resonant frequency of a Y-cut quartz BAW sensitive unit. An infrared sensor is fabricated by MEMS process, then the MXene quantum dot film is coated through the spin coating technology. The mechanism of infrared absorption enhancement is analyzed. Test results show that after coating the film, the responsivity (R) of the sensor increased by nearly 41% at a wavelength of 830nm, from 10.88MHz/W to 15.28 MHz/W. The quartz BAW infrared sensor combined with MXene quantum dots film has the potential of high-performance infrared detection.",

author = "Lihui Feng and Jiajun Luo and Xiaoxiao Ma and Jianmin Cui and Yu Chen and Jihua Lu and Linlin Zhang and Zhiqiang Pei",

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T1 - Study of MXene Ti3C2Tx quantum dot thin film on quartz bulk acoustic wave uncooled infrared sensors

AU - Feng, Lihui

AU - Luo, Jiajun

AU - Ma, Xiaoxiao

AU - Cui, Jianmin

AU - Chen, Yu

AU - Lu, Jihua

AU - Zhang, Linlin

AU - Pei, Zhiqiang

PY - 2022/9/12

Y1 - 2022/9/12

N2 - The infrared absorption efficiency is essential for an infrared sensor. We propose a quartz bulk acoustic wave (BAW) uncooled infrared sensor coated with MXene quantum dot film. The infrared detection is realized by measuring the resonant frequency of a Y-cut quartz BAW sensitive unit. An infrared sensor is fabricated by MEMS process, then the MXene quantum dot film is coated through the spin coating technology. The mechanism of infrared absorption enhancement is analyzed. Test results show that after coating the film, the responsivity (R) of the sensor increased by nearly 41% at a wavelength of 830nm, from 10.88MHz/W to 15.28 MHz/W. The quartz BAW infrared sensor combined with MXene quantum dots film has the potential of high-performance infrared detection.

AB - The infrared absorption efficiency is essential for an infrared sensor. We propose a quartz bulk acoustic wave (BAW) uncooled infrared sensor coated with MXene quantum dot film. The infrared detection is realized by measuring the resonant frequency of a Y-cut quartz BAW sensitive unit. An infrared sensor is fabricated by MEMS process, then the MXene quantum dot film is coated through the spin coating technology. The mechanism of infrared absorption enhancement is analyzed. Test results show that after coating the film, the responsivity (R) of the sensor increased by nearly 41% at a wavelength of 830nm, from 10.88MHz/W to 15.28 MHz/W. The quartz BAW infrared sensor combined with MXene quantum dots film has the potential of high-performance infrared detection.

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Study of MXene Ti3C2Tx quantum dot thin film on quartz bulk acoustic wave uncooled infrared sensors

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