Silicon-based integrated wobble micromotor

Xiqing Sun; Huikai Xie; Litian Liu; Zhijian Li; Peixin Qian

Silicon-based integrated wobble micromotor

Xiqing Sun^*, Huikai Xie, Litian Liu, Zhijian Li, Peixin Qian

^*此作品的通讯作者

Tsinghua University

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

A silicon-based integrated wobble micromotor has been successfully fabricated. The manufacturing process for this motor is very simple, including four photolithography steps, two for polysilicon films by LPCVD and two for silicon dioxide films by LTO. Both rotor and stator for this motor are formed from polysilicon films of 4.2 μm thick. The rotor-stator air gaps are 2.0-2.5 μm, the rotor diameters are 40-50 μm. The initial test results show that the minimum driving voltage is 49 V and the maximum rotational speed is about 600 rpm.

源语言	英语
页（从-至）	149-152
页数	4
期刊	Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors
卷	16
期	2
出版状态	已出版 - 2月 1995
已对外发布	是

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Sun, X., Xie, H., Liu, L., Li, Z., & Qian, P. (1995). Silicon-based integrated wobble micromotor. Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 16(2), 149-152.

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title = "Silicon-based integrated wobble micromotor",

abstract = "A silicon-based integrated wobble micromotor has been successfully fabricated. The manufacturing process for this motor is very simple, including four photolithography steps, two for polysilicon films by LPCVD and two for silicon dioxide films by LTO. Both rotor and stator for this motor are formed from polysilicon films of 4.2 μm thick. The rotor-stator air gaps are 2.0-2.5 μm, the rotor diameters are 40-50 μm. The initial test results show that the minimum driving voltage is 49 V and the maximum rotational speed is about 600 rpm.",

author = "Xiqing Sun and Huikai Xie and Litian Liu and Zhijian Li and Peixin Qian",

year = "1995",

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T1 - Silicon-based integrated wobble micromotor

AU - Sun, Xiqing

AU - Xie, Huikai

AU - Liu, Litian

AU - Li, Zhijian

AU - Qian, Peixin

PY - 1995/2

Y1 - 1995/2

N2 - A silicon-based integrated wobble micromotor has been successfully fabricated. The manufacturing process for this motor is very simple, including four photolithography steps, two for polysilicon films by LPCVD and two for silicon dioxide films by LTO. Both rotor and stator for this motor are formed from polysilicon films of 4.2 μm thick. The rotor-stator air gaps are 2.0-2.5 μm, the rotor diameters are 40-50 μm. The initial test results show that the minimum driving voltage is 49 V and the maximum rotational speed is about 600 rpm.

AB - A silicon-based integrated wobble micromotor has been successfully fabricated. The manufacturing process for this motor is very simple, including four photolithography steps, two for polysilicon films by LPCVD and two for silicon dioxide films by LTO. Both rotor and stator for this motor are formed from polysilicon films of 4.2 μm thick. The rotor-stator air gaps are 2.0-2.5 μm, the rotor diameters are 40-50 μm. The initial test results show that the minimum driving voltage is 49 V and the maximum rotational speed is about 600 rpm.

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JO - Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

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ER -

Silicon-based integrated wobble micromotor

摘要

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