Room-temperature-processed synaptic a-IGZO TFT with high-k HfLaO gate dielectric as neuromodulator

An Huang, Yuan Xiao Ma*, Jia Cheng Li, De Dai, Hui Xia Yang, Zi Chun Liu, De Cheng Zhang, Han Yang, Yuan Huang, Yi Yun Zhang, Xiao Ran Li*, Ye Liang Wang*, Pui To Lai

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摘要

In this work, room-temperature-processed amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) have been fabricated with high-k HfLaO as gate dielectric for synaptic devices. By raising the indium content in the a-IGZO film via co-sputtering and treating the HfLaO gate dielectric in an Ar plasma, the TFT with In1.0Ga3.0Zn0.4O2.1 presents excellent electrical characteristics: a high intrinsic carrier mobility of 45.8 cm2 V−1·s−1, a small threshold voltage of 1.93 V, a small hysteresis of −0.015 V, and a small subthreshold swing (SS) of 0.21 V dec−1. Although the oxygen vacancies in the In1.0Ga3.0Zn0.4O2.1 TFT are increased to produce a high carrier mobility, memristive behaviors are hardly observed under zero gate bias due to their occupied states. Various conductance modulations and synaptic plasticities are achieved under a 2-V drain spiking voltage and a small gate bias of 1 V due to migration of oxygen ions and emptying/detrapping of oxygen vacancies in the In1.0Ga3.0Zn0.4O2.1 film, resulting in a concurrent emulation of neurotransmitter and neuromodulator through exploiting the native three-terminal structure of the TFT.

源语言英语
文章编号115003
期刊Semiconductor Science and Technology
38
11
DOI
出版状态已出版 - 11月 2023

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Huang, A., Ma, Y. X., Li, J. C., Dai, D., Yang, H. X., Liu, Z. C., Zhang, D. C., Yang, H., Huang, Y., Zhang, Y. Y., Li, X. R., Wang, Y. L., & Lai, P. T. (2023). Room-temperature-processed synaptic a-IGZO TFT with high-k HfLaO gate dielectric as neuromodulator. Semiconductor Science and Technology, 38(11), 文章 115003. https://doi.org/10.1088/1361-6641/acf784