Research survey of electroformed nickel material properties used in MEMS

Guozhong Li, Gengchen Shi, Li Sui*, Futing Yi, Bo Wang

*此作品的通讯作者

科研成果: 期刊稿件文章同行评审

4 引用 (Scopus)

摘要

As one of the significant structural materials used in safe and arming system of MEMS fuze, the research on micro-electroforming process technologies and micro-electroforming nickel's properties have been a popular field for MEMS area. This paper surveys present domestic and overseas research status of mechanical characterization of electroformed nickel, summarizes and analyzes that changes of the microstructure led by parameters of micro-electroforming process and the external environment make great effects.

源语言英语
页(从-至)259-264
页数6
期刊Key Engineering Materials
645
DOI
出版状态已出版 - 1 5月 2015

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