Research survey of electroformed nickel material properties used in MEMS

Guozhong Li, Gengchen Shi, Li Sui*, Futing Yi, Bo Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

As one of the significant structural materials used in safe and arming system of MEMS fuze, the research on micro-electroforming process technologies and micro-electroforming nickel's properties have been a popular field for MEMS area. This paper surveys present domestic and overseas research status of mechanical characterization of electroformed nickel, summarizes and analyzes that changes of the microstructure led by parameters of micro-electroforming process and the external environment make great effects.

Original languageEnglish
Pages (from-to)259-264
Number of pages6
JournalKey Engineering Materials
Volume645
DOIs
Publication statusPublished - 1 May 2015

Keywords

  • Electroformed nickel
  • Fuze
  • MEMS
  • Material properties

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