Properties of Al-doped ZnO film transistors with different source and drain electrodes

Cheng Zhang, Dan Xie*, Jianlong Xu, Gang Li, Xiaowen Zhang, Yilin Sun, Yuanfan Zhao, Tingting Feng, Tianling Ren

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

We report the influences of Al doping and source/drain electrodes on the electrical performances of ZnO thin film transistors (TFTs).The electron mobility of Al-doped ZnO (AZO) films increases by two orders of magnitude with 1% Al doping, thus improving the performances of ZnO TFTs. TFTs with Ti/Pt source/drain electrodes exhibit better saturation and ON/OFF properties than that with Al electrodes, however, its drain current is relatively lower due to the Schottky structure formed between Pt/Ti and AZO layers.

源语言英语
主期刊名Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014
编辑Jia Zhou, Ting-Ao Tang
出版商Institute of Electrical and Electronics Engineers Inc.
ISBN(电子版)9781479932962
DOI
出版状态已出版 - 23 1月 2014
已对外发布
活动2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014 - Guilin, 中国
期限: 28 10月 201431 10月 2014

出版系列

姓名Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014

会议

会议2014 12th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014
国家/地区中国
Guilin
时期28/10/1431/10/14

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