@inproceedings{84800b9970354c34ae8d5f0cd4fd7052,
title = "Process risk prioritization of metalorganic chemical vapor deposition device",
abstract = "The metal-organic chemical vapor deposition (MOCVD) device is indispensable in the semiconductor manufacturing industry. The process risk prioritization is beneficial to secure the safe operations of MOCVD. To find out the weakness of the device, the hazard and operability (HAZOP) study can be used to assess the process risk of MOCVD. In this paper, to identify the crucial components and associated hazards, we introduce a hybrid method by integrating HAZOP and the interval analytical hierarchy process (IAHP) to prioritize the hazards for decision-makers. Firstly, we employ HAZOP to identify the failure causes and consequences of deviations. Then we conduct IAHP to prioritize the risk of MOCVD to identify the priority for the hazards with the same risk priority number (RPN). The combination valve section before the reactor of MOCVD is analyzed as the case study. The obtained results from the HAZOP analysis can support the lifecycle risk management of MOCVD.",
keywords = "HAZOP, interval analytical hierarchy process, metal-organic chemical vapor deposition",
author = "Xuan Liu and Huixing Meng and Weizhen Yao and Xianglin Liu and Chao Zhang",
note = "Publisher Copyright: {\textcopyright} 2022 ESREL2022 Organizers. Published by Research Publishing, Singapore.; 32nd European Safety and Reliability Conference, ESREL 2022 ; Conference date: 28-08-2022 Through 01-09-2022",
year = "2022",
doi = "10.3850/978-981-18-5183-4_R04-04-489-cd",
language = "English",
isbn = "9789811851834",
series = "Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future",
publisher = "Research Publishing",
pages = "158--164",
editor = "Leva, {Maria Chiara} and Edoardo Patelli and Luca Podofillini and Simon Wilson",
booktitle = "Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future",
}