Process risk prioritization of metalorganic chemical vapor deposition device

Xuan Liu; Huixing Meng; Weizhen Yao; Xianglin Liu; Chao Zhang

doi:10.3850/978-981-18-5183-4_R04-04-489-cd

Process risk prioritization of metalorganic chemical vapor deposition device

Xuan Liu, Huixing Meng^*, Weizhen Yao^*, Xianglin Liu, Chao Zhang

^*Corresponding author for this work

School of Mechatronical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The metal-organic chemical vapor deposition (MOCVD) device is indispensable in the semiconductor manufacturing industry. The process risk prioritization is beneficial to secure the safe operations of MOCVD. To find out the weakness of the device, the hazard and operability (HAZOP) study can be used to assess the process risk of MOCVD. In this paper, to identify the crucial components and associated hazards, we introduce a hybrid method by integrating HAZOP and the interval analytical hierarchy process (IAHP) to prioritize the hazards for decision-makers. Firstly, we employ HAZOP to identify the failure causes and consequences of deviations. Then we conduct IAHP to prioritize the risk of MOCVD to identify the priority for the hazards with the same risk priority number (RPN). The combination valve section before the reactor of MOCVD is analyzed as the case study. The obtained results from the HAZOP analysis can support the lifecycle risk management of MOCVD.

Original language	English
Title of host publication	Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future
Editors	Maria Chiara Leva, Edoardo Patelli, Luca Podofillini, Simon Wilson
Publisher	Research Publishing
Pages	158-164
Number of pages	7
ISBN (Print)	9789811851834
DOIs	https://doi.org/10.3850/978-981-18-5183-4_R04-04-489-cd
Publication status	Published - 2022
Event	32nd European Safety and Reliability Conference, ESREL 2022 - Dublin, Ireland Duration: 28 Aug 2022 → 1 Sept 2022

Publication series

Name	Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future

Conference

Conference	32nd European Safety and Reliability Conference, ESREL 2022
Country/Territory	Ireland
City	Dublin
Period	28/08/22 → 1/09/22

Keywords

HAZOP
interval analytical hierarchy process
metal-organic chemical vapor deposition

Access to Document

10.3850/978-981-18-5183-4_R04-04-489-cd

Cite this

Liu, X., Meng, H., Yao, W., Liu, X., & Zhang, C. (2022). Process risk prioritization of metalorganic chemical vapor deposition device. In M. C. Leva, E. Patelli, L. Podofillini, & S. Wilson (Eds.), Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future (pp. 158-164). (Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future). Research Publishing. https://doi.org/10.3850/978-981-18-5183-4_R04-04-489-cd

Liu, Xuan ; Meng, Huixing ; Yao, Weizhen et al. / Process risk prioritization of metalorganic chemical vapor deposition device. Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future. editor / Maria Chiara Leva ; Edoardo Patelli ; Luca Podofillini ; Simon Wilson. Research Publishing, 2022. pp. 158-164 (Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future).

@inproceedings{84800b9970354c34ae8d5f0cd4fd7052,

title = "Process risk prioritization of metalorganic chemical vapor deposition device",

abstract = "The metal-organic chemical vapor deposition (MOCVD) device is indispensable in the semiconductor manufacturing industry. The process risk prioritization is beneficial to secure the safe operations of MOCVD. To find out the weakness of the device, the hazard and operability (HAZOP) study can be used to assess the process risk of MOCVD. In this paper, to identify the crucial components and associated hazards, we introduce a hybrid method by integrating HAZOP and the interval analytical hierarchy process (IAHP) to prioritize the hazards for decision-makers. Firstly, we employ HAZOP to identify the failure causes and consequences of deviations. Then we conduct IAHP to prioritize the risk of MOCVD to identify the priority for the hazards with the same risk priority number (RPN). The combination valve section before the reactor of MOCVD is analyzed as the case study. The obtained results from the HAZOP analysis can support the lifecycle risk management of MOCVD.",

keywords = "HAZOP, interval analytical hierarchy process, metal-organic chemical vapor deposition",

author = "Xuan Liu and Huixing Meng and Weizhen Yao and Xianglin Liu and Chao Zhang",

note = "Publisher Copyright: {\textcopyright} 2022 ESREL2022 Organizers. Published by Research Publishing, Singapore.; 32nd European Safety and Reliability Conference, ESREL 2022 ; Conference date: 28-08-2022 Through 01-09-2022",

year = "2022",

doi = "10.3850/978-981-18-5183-4_R04-04-489-cd",

language = "English",

isbn = "9789811851834",

series = "Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future",

publisher = "Research Publishing",

pages = "158--164",

editor = "Leva, {Maria Chiara} and Edoardo Patelli and Luca Podofillini and Simon Wilson",

booktitle = "Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future",

}

Liu, X, Meng, H, Yao, W, Liu, X & Zhang, C 2022, Process risk prioritization of metalorganic chemical vapor deposition device. in MC Leva, E Patelli, L Podofillini & S Wilson (eds), Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future. Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future, Research Publishing, pp. 158-164, 32nd European Safety and Reliability Conference, ESREL 2022, Dublin, Ireland, 28/08/22. https://doi.org/10.3850/978-981-18-5183-4_R04-04-489-cd

Process risk prioritization of metalorganic chemical vapor deposition device. / Liu, Xuan; Meng, Huixing; Yao, Weizhen et al.
Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future. ed. / Maria Chiara Leva; Edoardo Patelli; Luca Podofillini; Simon Wilson. Research Publishing, 2022. p. 158-164 (Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Process risk prioritization of metalorganic chemical vapor deposition device

AU - Liu, Xuan

AU - Meng, Huixing

AU - Yao, Weizhen

AU - Liu, Xianglin

AU - Zhang, Chao

PY - 2022

Y1 - 2022

N2 - The metal-organic chemical vapor deposition (MOCVD) device is indispensable in the semiconductor manufacturing industry. The process risk prioritization is beneficial to secure the safe operations of MOCVD. To find out the weakness of the device, the hazard and operability (HAZOP) study can be used to assess the process risk of MOCVD. In this paper, to identify the crucial components and associated hazards, we introduce a hybrid method by integrating HAZOP and the interval analytical hierarchy process (IAHP) to prioritize the hazards for decision-makers. Firstly, we employ HAZOP to identify the failure causes and consequences of deviations. Then we conduct IAHP to prioritize the risk of MOCVD to identify the priority for the hazards with the same risk priority number (RPN). The combination valve section before the reactor of MOCVD is analyzed as the case study. The obtained results from the HAZOP analysis can support the lifecycle risk management of MOCVD.

AB - The metal-organic chemical vapor deposition (MOCVD) device is indispensable in the semiconductor manufacturing industry. The process risk prioritization is beneficial to secure the safe operations of MOCVD. To find out the weakness of the device, the hazard and operability (HAZOP) study can be used to assess the process risk of MOCVD. In this paper, to identify the crucial components and associated hazards, we introduce a hybrid method by integrating HAZOP and the interval analytical hierarchy process (IAHP) to prioritize the hazards for decision-makers. Firstly, we employ HAZOP to identify the failure causes and consequences of deviations. Then we conduct IAHP to prioritize the risk of MOCVD to identify the priority for the hazards with the same risk priority number (RPN). The combination valve section before the reactor of MOCVD is analyzed as the case study. The obtained results from the HAZOP analysis can support the lifecycle risk management of MOCVD.

KW - HAZOP

KW - interval analytical hierarchy process

KW - metal-organic chemical vapor deposition

UR - http://www.scopus.com/inward/record.url?scp=85208277771&partnerID=8YFLogxK

U2 - 10.3850/978-981-18-5183-4_R04-04-489-cd

DO - 10.3850/978-981-18-5183-4_R04-04-489-cd

M3 - Conference contribution

AN - SCOPUS:85208277771

SN - 9789811851834

T3 - Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future

SP - 158

EP - 164

BT - Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future

A2 - Leva, Maria Chiara

A2 - Patelli, Edoardo

A2 - Podofillini, Luca

A2 - Wilson, Simon

PB - Research Publishing

T2 - 32nd European Safety and Reliability Conference, ESREL 2022

Y2 - 28 August 2022 through 1 September 2022

ER -

Liu X, Meng H, Yao W, Liu X, Zhang C. Process risk prioritization of metalorganic chemical vapor deposition device. In Leva MC, Patelli E, Podofillini L, Wilson S, editors, Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future. Research Publishing. 2022. p. 158-164. (Proceedings of the 32nd European Safety and Reliability Conference, ESREL 2022 - Understanding and Managing Risk and Reliability for a Sustainable Future). doi: 10.3850/978-981-18-5183-4_R04-04-489-cd

Process risk prioritization of metalorganic chemical vapor deposition device

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this