@inproceedings{d0f21401b35449a8a6d158ef8943778f,
title = "Methods improve micro multiple configurations",
abstract = "The theory of compound zoom system and its influence and control on aberration are the basis for the design of such systems and have practical value in engineering. The principle, modeling and error analysis are analyed. Based on the system configuration of the compound zoom system, moreover, this paper advances the algorithm analysis.",
keywords = "Resolution, Sensor System, System Engineering",
author = "Hua Liu and Mingsuo Li and Ronggang Zhu and Liwei Zhou",
note = "Publisher Copyright: {\textcopyright} 2020 SPIE.; Optical Metrology and Inspection for Industrial Applications VII 2020 ; Conference date: 11-10-2020 Through 16-10-2020",
year = "2020",
doi = "10.1117/12.2573652",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Sen Han and Gerd Ehret and Benyong Chen",
booktitle = "Optical Metrology and Inspection for Industrial Applications VII",
address = "United States",
}