TY - GEN
T1 - High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability
AU - Jia, K.
AU - Pal, S.
AU - Xie, H.
PY - 2009
Y1 - 2009
N2 - This paper presents the design, fabrication method and experimental results of electrothermal bimorph-actuated micromirror arrays with tip-tilt-piston capability, hidden actuators, and 88% area fill factor.
AB - This paper presents the design, fabrication method and experimental results of electrothermal bimorph-actuated micromirror arrays with tip-tilt-piston capability, hidden actuators, and 88% area fill factor.
UR - http://www.scopus.com/inward/record.url?scp=71749116319&partnerID=8YFLogxK
U2 - 10.1109/OMEMS.2009.5338594
DO - 10.1109/OMEMS.2009.5338594
M3 - Conference contribution
AN - SCOPUS:71749116319
SN - 9781424423828
T3 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
SP - 67
EP - 68
BT - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
T2 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Y2 - 17 August 2009 through 20 August 2009
ER -