High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability

K. Jia; S. Pal; H. Xie

doi:10.1109/OMEMS.2009.5338594

High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability

K. Jia^*, S. Pal, H. Xie

^*Corresponding author for this work

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Citations (Scopus)

Abstract

This paper presents the design, fabrication method and experimental results of electrothermal bimorph-actuated micromirror arrays with tip-tilt-piston capability, hidden actuators, and 88% area fill factor.

Original language	English
Title of host publication	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Pages	67-68
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2009.5338594
Publication status	Published - 2009
Externally published	Yes
Event	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 - Clearwater, FL, United States Duration: 17 Aug 2009 → 20 Aug 2009

Publication series

Name	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Conference

Conference	2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009
Country/Territory	United States
City	Clearwater, FL
Period	17/08/09 → 20/08/09

Access to Document

10.1109/OMEMS.2009.5338594

Cite this

Jia, K., Pal, S., & Xie, H. (2009). High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 (pp. 67-68). Article 5338594 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009). https://doi.org/10.1109/OMEMS.2009.5338594

@inproceedings{2d80732df7f845d49295071a2a6e0999,

title = "High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability",

abstract = "This paper presents the design, fabrication method and experimental results of electrothermal bimorph-actuated micromirror arrays with tip-tilt-piston capability, hidden actuators, and 88% area fill factor.",

author = "K. Jia and S. Pal and H. Xie",

year = "2009",

doi = "10.1109/OMEMS.2009.5338594",

language = "English",

isbn = "9781424423828",

series = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

pages = "67--68",

booktitle = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",

note = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 ; Conference date: 17-08-2009 Through 20-08-2009",

}

Jia, K, Pal, S & Xie, H 2009, High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability. in 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009., 5338594, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, pp. 67-68, 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009, Clearwater, FL, United States, 17/08/09. https://doi.org/10.1109/OMEMS.2009.5338594

High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability. / Jia, K.; Pal, S.; Xie, H.
2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 67-68 5338594 (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Jia, K.

AU - Pal, S.

AU - Xie, H.

PY - 2009

Y1 - 2009

N2 - This paper presents the design, fabrication method and experimental results of electrothermal bimorph-actuated micromirror arrays with tip-tilt-piston capability, hidden actuators, and 88% area fill factor.

AB - This paper presents the design, fabrication method and experimental results of electrothermal bimorph-actuated micromirror arrays with tip-tilt-piston capability, hidden actuators, and 88% area fill factor.

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DO - 10.1109/OMEMS.2009.5338594

M3 - Conference contribution

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T3 - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

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BT - 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

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Jia K, Pal S, Xie H. High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability. In 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009. 2009. p. 67-68. 5338594. (2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009). doi: 10.1109/OMEMS.2009.5338594

High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability

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