Gas dynamic-thermal-concentration fields and evaporation process of quartz particles in Ar-H2inductively coupled plasma

L. Miao*, Yu M. Grishin

*此作品的通讯作者

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4 引用 (Scopus)

摘要

The gas dynamic-thermal-concentration fields and evaporation process of quartz particles in the TICP torch of argon-hydrogen plasma have been studied. The effects of different methods of supplying hydrogen on the hydrogen concentration and gas temperature distributions, as well as on the vortex flow patterns have been discussed. The particle injection conditions in the pure argon and argon-hydrogen plasma have been determined. The dependences of the axial gas temperature and velocity distributions on the hydrogen volume fraction, flow rate of central gas and particle feed rate have been established. The effect of hydrogen volume fraction and different methods of supplying hydrogen on the evaporation degree of quartz particle in the TICP torch has been determined. The influences of the particle injection conditions (flow rate of central gas, probe tip position and injection patterns) on the evaporation degree in the TICP torch have also been evaluated. The specific heat cost for quartz particle evaporation has been calculated to evaluate the utilization efficiency of thermal energy.

源语言英语
文章编号065006
期刊Plasma Sources Science and Technology
29
6
DOI
出版状态已出版 - 6月 2020
已对外发布

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