Gas dynamic-thermal-concentration fields and evaporation process of quartz particles in Ar-H2inductively coupled plasma

L. Miao*, Yu M. Grishin

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

The gas dynamic-thermal-concentration fields and evaporation process of quartz particles in the TICP torch of argon-hydrogen plasma have been studied. The effects of different methods of supplying hydrogen on the hydrogen concentration and gas temperature distributions, as well as on the vortex flow patterns have been discussed. The particle injection conditions in the pure argon and argon-hydrogen plasma have been determined. The dependences of the axial gas temperature and velocity distributions on the hydrogen volume fraction, flow rate of central gas and particle feed rate have been established. The effect of hydrogen volume fraction and different methods of supplying hydrogen on the evaporation degree of quartz particle in the TICP torch has been determined. The influences of the particle injection conditions (flow rate of central gas, probe tip position and injection patterns) on the evaporation degree in the TICP torch have also been evaluated. The specific heat cost for quartz particle evaporation has been calculated to evaluate the utilization efficiency of thermal energy.

Original languageEnglish
Article number065006
JournalPlasma Sources Science and Technology
Volume29
Issue number6
DOIs
Publication statusPublished - Jun 2020
Externally publishedYes

Keywords

  • demixing effect
  • evaporation degree
  • hydrogen supply methods
  • particle injection conditions

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